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发明名称
LOCOS ISOLATION FÜR EINE VOLLSTÄNDIG VERARMTE SOI STRUKTUR
摘要
申请公布号
DE60334735(D1)
申请公布日期
2010.12.09
申请号
DE20036034735
申请日期
2003.12.08
申请人
INTEL CORPORATION
发明人
BOHR, MARK;TSAI, JULIE
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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