| 摘要 |
PROBLEM TO BE SOLVED: To suppress the attachment of a reaction substance to a pressure meter of exhaust gas treatment equipment. SOLUTION: The exhaust gas treatment equipment 100 includes discharge piping 2 connected to the discharge side of a treatment chamber (e.g., a reaction chamber 1), and the partial section of the discharge piping 2 constitutes branches 3 branched into a plurality of systems. Respective systems 3a, 3b of the branches 3 include: traps 4a, 4b for collecting the reaction production substance contained in exhaust gas; and the pressure meters 5a, 5b positioned at downstream sides of the traps 4a, 4b. Switching parts (e.g., switch valves 6a, 6b) are arranged at downstream sides of the pressure meters 5a, 5b which switch the discharge systems so as to allow the selected one between the respective systems 3a, 3b of the branch sections 3 being an active system to pass the exhaust gas and to allow the other system to be a stand-by system not to pass the exhaust gas. COPYRIGHT: (C)2011,JPO&INPIT
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