发明名称 PACKAGING AND TESTING OF MULTIPLE MEMS DEVICES ON A WAFER
摘要 A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.
申请公布号 US2010311192(A1) 申请公布日期 2010.12.09
申请号 US20100856981 申请日期 2010.08.16
申请人 SPATIAL PHOTONICS, INC. 发明人 PAN SHAOHER X.;NOVOTNY VLAD
分类号 H01L21/66 主分类号 H01L21/66
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