| 摘要 |
In a method for gauging surfaces (7″), in which a frequency-modulated laser beam is generated, the laser beam is emitted onto the surface as measuring radiation (MS), the measuring radiation (MS) backscattered from the surface (7″) is received and the distance between a reference point and the surface (7″) is measured interferometrically, wherein the measuring radiation (MS) is emitted and received while the surface to be gauged is being scanned, and a measuring arm and a reference interferometer arm with a partially common beam path are used, deviations from the essentially perpendicular impingement of the measuring radiation (MS) on the surface (7″) are taken into account algorithmically during distance measurement and/or are avoided or reduced during scanning by controlling the emission of the measuring radiation (MS).
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