| 摘要 |
<p>The present invention relates to a plasma-generation device (600) with electron cyclotron resonance, comprising two adjacent sealed vacuum chambers (601, 602) intended for containing plasmas, a means (15) for injecting a high-frequency wave into said chambers, a magnetic structure for generating a magnetic field in the chambers comprising a plurality of parallelepipedal permanent magnets (610, 611, 612, 613, 614, 615, 616, 617, 618, 619, 620, 621) and generating at least two plasmas according to the magnetic field lines, said module of said magnetic field having a magnetic mirror configuration with at least one electron cyclotron resonance area per plasma, said magnetic structure comprising at least one permanent magnet (614, 615, 616, 617) contributing to the formation of a plasma in each one of the chambers, such that said chambers share the same at least one permanent magnet (614, 615, 616, 617) on the common wall thereof.</p> |
