| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe microscope capable of qualitatively and quantitatively evaluating ions present in the vicinity of the surface of a sample and easily and highly sensitively detecting impurities, defects, origins of corrosion, etc. SOLUTION: The probe microscope comprises a test cell capable of holding a sample and injecting a liquid; a probe; a counter electrode; a reference electrode; a drive mechanism for making the probe scan the surface of the sample as following the surface; an electric potential control part for controlling the electric potential between the probe and the reference electrode; and a current measuring part for measuring a current flowing between the probe and the reference electrode. The material of the probe is an electric conductor containing any of gold or a gold alloy; carbon or a carbon compound; boron; zinc; lead; tin; and mercury. COPYRIGHT: (C)2011,JPO&INPIT |
