| 发明名称 |
LITHOGRAPHY APPARATUS USING EXTREME UV RADIATION AND HAVING A VOLATILE ORGANIC COMPOUNDS SORBING MEMBER COMPRISING A GETTER MATERIAL |
| 摘要 |
A lithography apparatus (10) is disclosed using extreme UV radiation and having a hydrocarbon sorbing member comprising a getter material arranged in the process chamber (13) of said apparatus.
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| 申请公布号 |
US2010309446(A1) |
申请公布日期 |
2010.12.09 |
| 申请号 |
US20090812948 |
申请日期 |
2009.02.10 |
| 申请人 |
SAES GETTERS S.P.A. |
发明人 |
MANINI PAOLO;CONTE ANDREA |
| 分类号 |
G03B27/52 |
主分类号 |
G03B27/52 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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