| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a substrate support which suppresses the corrosion of bellows and the dust emission from the bellows, and also has a part to be driven with a reduced volume and weight, and to provide a plasma treatment apparatus. SOLUTION: In the plasma treatment apparatus 10, the substrate support has the structure which has a cylindrical internal cylinder 12, a bellows 13, an external cylinder 14 and a covering member 15 sequentially and concentrically arranged from the inside, and also has a drive member 21 which is driven by a driving mechanism 24 attached to the rear surface of a mounting table 16 through an opening 11b and the inner part of the internal cylinder 12. COPYRIGHT: (C)2011,JPO&INPIT |
