发明名称 TILTING STAGE AND MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a tilting stage that can smoothly adjust a tilting angle during the determination of an observing condition and can hold a tilting angle during the observation, and to provide a microscope having the tilting stage. SOLUTION: The tilting stage 3 includes: a base 21 provided with three magnets 45; and a stage 23 capable of tilting which has on the upper side thereof a stage plate 25 on which a specimen is placed and has on the underside a cup 27 which is slidably held with respect to the base 21, and formed of a magnetic substance. The tilting stage also includes a pulling-force adjusting means for adjusting a pulling force between the base 21 and the stage 23 by altering the position of the magnet 45 in order to adjust and hold the tilting angle of the stage 23. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010276711(A) 申请公布日期 2010.12.09
申请号 JP20090126808 申请日期 2009.05.26
申请人 NIKON CORP 发明人 HOSOBUCHI SEITO
分类号 G02B21/26 主分类号 G02B21/26
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