发明名称 MEASURING DEVICE AND MEASURING METHOD OF OPTICAL CHARACTERISTICS OF LIGHT SOURCE, AND INSPECTION DEVICE INCLUDING THE MEASURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a measuring device and a measuring method of an optical characteristic of a light source having excellent measuring efficiency, capable of acquiring a measurement result equivalent to an integrating sphere system without using an expensive integrating sphere, and to provide an inspection device including the measuring device. SOLUTION: A light source, a plurality of light receiving means having each light receiving part for receiving directly light radiated from the light source, and a light receiving means support means are prepared. The light source is arranged on the center of a virtual sphere, and at least two of the light receiving parts of each light receiving means are arranged on positions corresponding to the surface center of each surface, a middle point of each side, or each vertex of a virtual regular polyhedron inscribed on the virtual sphere, or on positions corresponding to some combination thereof. Then, the light source is allowed to emit light, and output from each light receiving means is detected, and spectral spectrum information of the light source is extracted, and the spectral spectrum information is subjected to operation processing, to thereby analyze the optical characteristic of the light source. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010276565(A) 申请公布日期 2010.12.09
申请号 JP20090131769 申请日期 2009.06.01
申请人 SYSTEMROAD CO LTD 发明人 MORITA TAKAHIKO
分类号 G01J3/36;G01J1/00;G01M11/00 主分类号 G01J3/36
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