| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample carrying/introducing device to a vacuum device which can handle each kind of sample holder, can be manufactured, improved, and repaired easily, has improved working efficiency, and can reduce manufacturing and maintenance costs. SOLUTION: The sample carrying/introducing device to a vacuum device includes: a straight line introduction device 10 for allowing a movable pipe 15 to advance or retreat by translatory movement; a sample holder storage section 30 for storing a sample holder 90 for installing samples; and a vacuum vessel 50 for forming a vacuum tank 53 for storing the sample holder 90 by fitting to a sample holder backing plate 31 of the sample holder storage section 30. In the sample carrying/introducing device, the sample holder storage section 30 is detachably mounted to the tip section of the movable pipe 15 of the straight line introduction device 10, and the vacuum vessel 50 is detachably mounted to the tip section of a body 11 in the straight line introduction device 10. COPYRIGHT: (C)2011,JPO&INPIT
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