| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection tool that can correspond to micronization or complication of a substrate and has a simplified structure having a reduced number of part items. SOLUTION: This inspection tool is adapted to connect an inspection object as an inspection target to an inspecting device. In the inspection jig, a contact probe 2 has an outer cylindrical unit 2b having openings at both ends and an inner cylindrical unit 2a that is placed at the inside of the outer cylindrical unit and respectively protrudes from the both ends of the outer cylindrical unit. The inner cylindrical unit includes a first cylindrical part 2a1 to be contacted with an inspection point, a first expansion/contraction part 2a4 capable of expanding or contracting in a longitudinal direction of the inner cylindrical unit, a second cylindrical part 2a2 having another end to be contacted with an electrode part, a second expansion/contraction part 2a5 capable of expanding or contracting in a longitudinal direction of the contact probe and a third cylindrical part 2a3 coupling the first expansion/contraction part to the second expansion/contraction part so as to achieve communication with each other. The first cylindrical part, first expansion/contraction part, third cylindrical part, second expansion/contraction part and second cylindrical part are formed of a single cylindrical member. A connection part for fixing the outer cylindrical unit to the inner cylindrical unit is formed at the third cylindrical part. COPYRIGHT: (C)2011,JPO&INPIT |
