METAL OXIDE SEMICONDUCTOR (MOS) SOLID STATE IMAGING DEVICE THAT INCLUDES A SURFACE LAYER FORMED BY IMPLANTING A HIGH CONCENTRATION OF IMPURITY DURING CREATION OF A PHOTODIODE, AND MANUFACTURING METHOD THEREOF

摘要

A photodiode has a carrier accumulation layer of a second conductivity type and a surface area of a first conductivity type deposited in order from an inside towards a surface of a first conductivity type well region. A transfer transistor is formed so that a transfer gate electrode of the transfer transistor partially overlaps the surface layer of the photodiode and is formed above a surface of the first conductivity type well region with a gate insulating film therebetween. The surface layer includes a first surface layer, which partially overlaps the transfer gate electrode in the direction of the x-axis, and a second surface layer adjacent to the first surface layer. A concentration of the impurity of the first conductivity type is higher in the second surface layer than in the first surface layer.