,申请号JP20010107659-传众专利搜索

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发明名称
摘要
申请公布号	JP4595232(B2)	申请公布日期	2010.12.08
申请号	JP20010107659	申请日期	2001.04.05
申请人		发明人
分类号	C23C14/26;H05B33/10;C23C14/12;H01L51/50;H05B33/12;H05B33/14	主分类号	C23C14/26
代理机构		代理人
主权项
地址

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