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发明名称
摘要
申请公布号
JP4595224(B2)
申请公布日期
2010.12.08
申请号
JP20010090984
申请日期
2001.03.27
申请人
发明人
分类号
H01L21/265;H01L21/336;H01L29/12;H01L29/78
主分类号
H01L21/265
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