LOW-RESISTIVITY SILICON CARBIDE CERAMICS, COMPOSITIONS THEREOF AND PROCESS FOR PRODUCING THE SAME

摘要

PURPOSE: A resistivity silicon carbide sintered body is provided to reduce volume resistivity of a silicon carbide ceramic material and to reduce the content of a sintering aid, using polysiolxane, carbon precursor, and β-silicon carbide powder. CONSTITUTION: A resistivity silicon carbide sintered body composition comprises 5.5-65 weight% polysiloxane, 3.5-40 weight% at least one kind of carbon precursor selected from phenol resin and xylene resin, 0.1-90 weight% -silicon carbide powder, 0.01-0.3 weight% aluminum-nitride, and 0.01-0.5 weight% rare earth metal oxide.