ACCELERATION SENSOR ELEMENT AND ACCELERATION SENSOR HAVING THE SAME

摘要

PURPOSE: An acceleration sensor device and a sensor thereof are provided to control the variation of an output due to an external force by arranging a connection part with the inner frame of an inner frame in a distant location from the connection part with the inner frame of a beam part. CONSTITUTION: A support frame part(11) surrounds a plumb part. A plurality of beam parts(13) has the flexibility by connecting the plumb part to the support frame part and maintaining the connection. A piezo resistance device is installed on the beam part. An upper side lid and a lower side lid surround in the vicinity of the plumb part with the support frame part. An acceleration sensor device(10) the acceleration of at least one axial direction among a first, a second, and a third axis.