发明名称 BREAKING APPARATUS AND BREAKING METHOD
摘要 PURPOSE: A breaking apparatus and a breaking method are provided to cut a substrate regardless of the shapes of the substrate along scribe lines by determining the position of the apparatus for each scribe line. CONSTITUTION: A base part(20) supports a table. A transferring groove(24) in the X-axis direction is formed on the center of the table. A position determining part(30) includes a slider(31) and a fixing unit(32). A clamp unit(40) supports a cross section part of a substrate to be cut. A scribe line is formed on the substrate. A breaking unit(50) pressurizes and breaks a protruded part of the substrate from the table.
申请公布号 KR20100129222(A) 申请公布日期 2010.12.08
申请号 KR20100050123 申请日期 2010.05.28
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. 发明人 MAEKAWA KAZUYA;ICHIKAWA KATSUNORI
分类号 H01L21/301 主分类号 H01L21/301
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