发明名称 |
BREAKING APPARATUS AND BREAKING METHOD |
摘要 |
PURPOSE: A breaking apparatus and a breaking method are provided to cut a substrate regardless of the shapes of the substrate along scribe lines by determining the position of the apparatus for each scribe line. CONSTITUTION: A base part(20) supports a table. A transferring groove(24) in the X-axis direction is formed on the center of the table. A position determining part(30) includes a slider(31) and a fixing unit(32). A clamp unit(40) supports a cross section part of a substrate to be cut. A scribe line is formed on the substrate. A breaking unit(50) pressurizes and breaks a protruded part of the substrate from the table.
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申请公布号 |
KR20100129222(A) |
申请公布日期 |
2010.12.08 |
申请号 |
KR20100050123 |
申请日期 |
2010.05.28 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. |
发明人 |
MAEKAWA KAZUYA;ICHIKAWA KATSUNORI |
分类号 |
H01L21/301 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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