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发明名称
LOW-COST SUBSTRATES HAVING HIGH-RESISTIVITY PROPERTIES AND METHODS FOR THEIR MANUFACTURE
摘要
申请公布号
KR20100129333(A)
申请公布日期
2010.12.08
申请号
KR20107024504
申请日期
2009.05.21
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
MAZURE CARLOS;NGUYEN BICH YEN
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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