AN METHOD OF FORMING BUFFER LAYERS FOR SUPERCONDUCTING TAPE

摘要

PURPOSE: A method for manufacturing a buffer layer of a superconductive wire is provided to prevent the oxidation of a metal substrate by forming a buffer layer through sputtering of a metal oxide target on the metal substrate. CONSTITUTION: A biaxially oriented metal substrate and a metal oxide target are loaded into a deposition apparatus(S100). A vacuum atmosphere is created inside the deposition apparatus(S200). Argon gas is supplied to the inside of the deposition apparatus and the metal substrate is heated(S300). A buffer layer is formed on a side of the heated metal substrate by sputtering the metal oxide target(S400). The buffer layer is heat-treated(S500).