| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an active oxygen sterilizer capable of performing the sterilization treatment while controlling the ozone concentration low inside a treatment chamber. <P>SOLUTION: A first ultraviolet generating lamp 40 generates ultraviolet rays in the vacuum ultraviolet range, and a second ultraviolet generating lamp 50 generates ultraviolet rays in the far-ultraviolet range. The lamps 40 and 50 are mounted inside the chamber 10. After the pressure inside the chamber 10 is reduced by a vacuum pump 70, gas including oxygen is fed into the chamber 10 from an oxygen feeding device 30, and the first and second ultraviolet generating lamps 40 and 50 are lighted. As a result, active oxygen is generated inside the chamber 10, and an object to be treated is sterilized with the generated active oxygen. At the time, the gas flowing into the chamber 10 and the generated active oxygen etc., can be quickly diffused to all the parts inside the chamber 10. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
