LITHOGRAPH APPARATUS FOR USING A BALLISTIC-ELECTRON EMISSION DEVICE
摘要
<p>PURPOSE: A lithograph apparatus using a ballistic-electron emission device is provided to reduce the size by simplifying the structure of a lithography apparatus by minimizing a scanning process for patterning or skipping the scanning process. CONSTITUTION: A ballistic electron discharging device(110) is installed inside the main body(120) and discharges the ballistic electron. A top electrode(114) of the ballistic electron discharging device is arranged in a direction opposing a transmitting window. The inside of the main body is maintained to keep the vacuum condition.</p>
