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发明名称
ANCHORS FOR MICROELECTROMECHANICAL SYSTEMS HAVING AN SOI SUBSTRATE, AND METHOD OF FABRICATING SAME
摘要
申请公布号
EP1652219(A4)
申请公布日期
2010.12.08
申请号
EP20040801839
申请日期
2004.03.31
申请人
发明人
分类号
H01L21/00;B81B3/00;G01P15/00;H01L;H01L27/01;H01L29/82;H01L29/84
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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