发明名称 |
Method and system for providing a structure in a microelectronic device using a chromeless alternating phase shift mask |
摘要 |
A method and system for providing a microelectric device, such as a magnetoresistive read sensor are described. The method and system include providing a mask layer on the microelectric device. The method and system further include exposing the mask layer to provide a mask. A portion of the mask covers a portion of the microelectric device. The step of exposing the mask layer further includes utilizing a chromeless alt-phase shift mask for providing the portion of the mask.
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申请公布号 |
US7846643(B1) |
申请公布日期 |
2010.12.07 |
申请号 |
US20070934599 |
申请日期 |
2007.11.02 |
申请人 |
WESTERN DIGITAL (FREMONT), LLC |
发明人 |
SUN HAI;YU WINNIE;YUAN HONGPING;WANG YIZHONG;ZENG XIANZHONG |
分类号 |
G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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