发明名称 Semiconductor device and method for manufacturing the same
摘要 The present invention provides a semiconductor device and a method of manufacturing the semiconductor device, the semiconductor device including: ONO films that are formed on a semiconductor substrate and include trapping layers; word lines that are formed on the ONO films; and silicon oxide layers that are formed at portions on the semiconductor substrate, the portions being located between the word lines, the silicon oxide layers being located between the trapping layers.
申请公布号 US7847340(B2) 申请公布日期 2010.12.07
申请号 US20070963400 申请日期 2007.12.21
申请人 SPANSION LLC 发明人 FUJII KENICHI;OKANISHI MASATOMI
分类号 H01L29/792;H01L21/336 主分类号 H01L29/792
代理机构 代理人
主权项
地址