发明名称 |
Method of reducing the time required to perform a passive voltage contrast test |
摘要 |
The time required to perform a passive voltage contrast test of an area of interest of a layer of interest is substantially reduced by digitizing a passive voltage contrast image to form contrast data that represents the image, and comparing the contrast data to computer aided design (CAD) data that defines the semiconductor device.
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申请公布号 |
US7848562(B1) |
申请公布日期 |
2010.12.07 |
申请号 |
US20050235794 |
申请日期 |
2005.09.26 |
申请人 |
NATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
JACOBSON STEVEN;NGUYEN DUC HUU;NG WILLIAM;GEMMILL ZACHARY JOSHUA;BHIMAVARAPU USHARANI;WEAVER KEVIN |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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