PROCESS AND APPARATUS FOR FABRICATING MAGNETIC DEVICE

摘要

PURPOSE: An apparatus and a method for manufacturing a magnetic element are provided to reduce damages generated from an etching process without an oxidation reaction on the etched surface of the magnetic element by changing a magnetic property using a mixed gas of a carbon hydride gas and a non-active gas. CONSTITUTION: High frequency power supplying source for plasma(13) generates high frequency power which is applied to an antenna(12). A current flows through the antenna. An electromagnet(14) generates pre-set magnetic field in a dielectric wall-based container(11). A plurality of magnets for a sidewall(22) is arranged along the external peripheral of the sidewall in order to prevent the spread of plasma to the inside of the sidewall.