LASER ABLATION APPARATUS AND METHOD FOR MANUFACTURING OPENING USING IT
摘要
PURPOSE: A laser etching apparatus and an aperture forming method using the same are provided to form a gap pattern on a rear passivation layer through a further simplified process using the laser etching technology in stead of photo etching technology in the manufacturing process of thin solar battery of high efficiency. CONSTITUTION: A stage part(160) supports the silicon substrate of solar battery formed with the rear passivation layer. A laser generator(110) generates the laser beam adjusted according to the passivation information. A beam forming unit(130) modifies the size and the shape of a spot of the laser beam according to the size and the shape of the aperture. A projection unit(150) concentrates the laser beam scanned by the scanning unit and irradiates the laser beam.
申请公布号
KR20100128153(A)
申请公布日期
2010.12.07
申请号
KR20090046624
申请日期
2009.05.27
申请人
MEERE COMPANY INC.;KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
发明人
SONG, CHEONG HO;BAEK, KWANG SOO;KIM, BYEONG KYOUM;KIM, DONG HWAN;LEE, JOON SUNG;PARK, HA YOUNG