发明名称 Bit line of a semiconductor device and method for fabricating the same
摘要 A bit line of a semiconductor device includes a first interlayer dielectric film disposed on a semiconductor substrate, a plurality of bit line stacks disposed on the first interlayer dielectric film, a plurality of bit line spacers disposed on side walls of the bit line stacks, and a buffer film disposed on the bit line spacers, the first interlayer dielectric film and the bit line stacks; and a method for fabricating the same.
申请公布号 US7846795(B2) 申请公布日期 2010.12.07
申请号 US20080141859 申请日期 2008.06.18
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHUNG JIE WON
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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