CLEANING APPARATUS BASED ON PULSE LASER-INDUCED BREAKDOWN OF DROPLET OR LIQUID JET AND METHOD

摘要

PURPOSE: A cleaning apparatus based on pulse laser-induced breakdown of droplet or liquid jet and a method thereof are provided to increase the removing efficiency without increasing the energy of the pulse laser beam as the contaminant attached on the target object is removed. CONSTITUTION: A nozzle(2) is distanced from the cleaning object as much as the set distance. The nozzle supplies the liquid to the focus position of the pulse laser beam. A laser gun(4) irradiates the pulse laser beam in the direction parallel with the cleaning object in order to aim the liquid. An optical system(6) is installed between the laser gun and the liquid.