| 摘要 |
PURPOSE: A boat is provided to prevent the deformation of a substrate by decentralizing the load of the substrate when a thermal process is executed by forming a first and a second rod. CONSTITUTION: A chamber has a space in order to execute a thermal process in a batch type heating device. A first main body part(200a) includes a lower frame(210a) and an upper frame(220a) with a vertical frame(230a). A first and a second main body part(200b) are symmetrical to each other. Both ends of the vertical frame are connected to the lower frame and the upper frame, respectively.
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