| 摘要 |
To be able to restrain a height of a machine even when the machine is large-sized and smoothly move a table in XY&thetas; directions. An alignment apparatus includes two translational freedom degree guide portion (13), one rotational freedom degree guide portion (12), a translational drive/translational/rotational freedom degree mechanism module (6) including a linear motor provided at one of the translational freedom degree guide portion (13), a machine base portion (7), a reference generator portion (8), a two-dimensional position sensor (9), a calculating portion of compensation value (10). At least three of the translational drive/translational/rotational freedom degree mechanism modules (6) are uniformly arranged to a table (4).
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