| 摘要 |
PURPOSE: By weighting in the part except for the narrow pitch electrode finger part and the electrode finger part which is contiguous to the narrow pitch electrode finger part apodization the acoustic wave device forms the electrode finger part which is contiguous to the narrow pitch electrode finger part into the interdigital transducer of the canonical form. CONSTITUTION: Piezoelectric is composed of LiNbO3. The first dielectric layer is composed of the silicon oxide. The second dielectric layer is composed of the silicon nitride. It is composed by laminating the layer consisting of the layer which electrode is in order included from piezoelectric of Pt and al. The elastic boundary wave filter(10) comprises the first interdigital transducer(11), and the second and the third interdigital transducers and reflectors(14, 15).
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