A SUSCEPTOR IN EPITAXIAL WAFER MANUFACTURING APPARATUS

摘要

PURPOSE: A susceptor in an epitaxial wafer manufacturing apparatus is provided to prevent damage to a wafer by suppressing an auto-doping even in case of an epitaxial wafer. CONSTITUTION: A plurality of exhaust holes(200) have a repeated certain pattern which has two holes having a &thgr;11 and &thgr;12 angle from the bottom of a susceptor(100). A plurality of exhaust holes have a symmetry pattern on the susceptor and have a bend form.