| 摘要 |
PURPOSE: An ultraviolet irradiation device is provided to maintain the intensity of radiation certain at the radiation position of the diodes respectively by controlling the output of each diode. CONSTITUTION: A table(8) loads semiconductor wafer to which the protection tape is attached. A driving mechanism rotates the table. A plurality of ultraviolet light emitting diodes are arranged in at least radial direction of the semiconductor wafer. An amplifier reinforces power to be supplied to the ultraviolet light emitting diode. |
