| 摘要 |
<p>PURPOSE: An apparatus for performing a development process is provided to uniformly apply developing liquid to a target layer by regulating the flow of the developing liquid. CONSTITUTION: A stage is arranged in a reaction chamber(200). A first tube(201) is in connection with the upper side of the reaction chamber. A second tube(203) is in connection with the lower side of the reaction chamber. A developing liquid supplying part(217) supplies developing liquid to the inside of the chamber through the first tube. A cleaning liquid supplying part(233) supplies cleaning liquid to the inside of the reaction chamber through the first tube.</p> |
