,申请号JP20000183410-传众专利搜索

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发明名称
摘要
申请公布号	JP4579376(B2)	申请公布日期	2010.11.10
申请号	JP20000183410	申请日期	2000.06.19
申请人		发明人
分类号	G01B11/00;H01L21/027;G03F7/20;G03F9/00	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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