| 摘要 |
The invention relates to metallurgy, namely to a construction of spray device for application of ultra-porous coatings of metals or heavy substances in vacuum on plane substrates. The spray device for application of ultra-porous coatings of metals or heavy substances in vacuum on plane substrates comprises the anode and cathode as hollow truncated cone with aperture directed to anode, said cone is fixed on support connected with cooled holder, inside said cone substrate is located in its the bottom part, at that a gate is located near the surface of the bottom part, for moving of gate in the lateral surface of said cone aperture is made, at that to the top part of said cone of cathode connected case of cathode as cylindrical hermetic case with through axis aperture and inside of this cylindrical hermetic case cooled magnetic system as two-section circular constant magnet is located, branch pipes for supply and withdrawal of heat-carrying for this system are connected to lateral walls of cylindrical hermetic case and spray target as disk with through aperture is connected to the top part of said cylindrical case, at that through aperture is jointed with apertures of hollow truncated cone and cylindrical hermetic case of cathode, at that diameter of through aperture of spray machine is made less of minimal diameter of spraying zone, in addition, system with branch pipes for supply and withdrawal of heat-carrying is installed in case of cooled holder. The invention provides the producing of ultra-porous layers of metals and other heavy substances with extensionand control of conditions of application of ultra-porous coating. |
