| 摘要 |
A non-contact conveyance system of the invention has a static pressure table 1 for levitating a conveyance object S upward, a pair of conveying units 10A and 10B having vibrating plates 11 and actuators 12 and a moving unit for moving the conveying units 10A and 10B in a conveying direction. Then, retaining forces are applied to front and rear edge portions Sa and Sb of the conveyance object S facing to the vibrating plates 11 by exciting deflection standing waves in the vibrating plates 11 by the actuators 12. Then, when the conveying units 10A and 10B are moved while applying the retaining forces to the edge portions Sa and Sb of the conveyance object S, the conveyance object S is conveyed following the move of the conveying units 10A and 10B. Thereby, a number of parts may be cut and the system may be downsized.
|
