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经营范围
发明名称
ETCHING OF ALGAINASSB
摘要
申请公布号
EP1581668(B1)
申请公布日期
2010.11.10
申请号
EP20030768404
申请日期
2003.12.19
申请人
INTEGRATED OPTOELECTRONICS AS
发明人
BUGGE, RENATO;FIMLAND, BJOERN-OVE
分类号
C23F1/16;C23F1/30;H01L21/306;H01L21/311;H01L21/465;H01P11/00;H01S5/323
主分类号
C23F1/16
代理机构
代理人
主权项
地址
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