发明名称 |
3-AXIS MAGNETIC SENSOR AND MANUFACTURING METHOD THEREOF |
摘要 |
In the three-axis magnetic sensor of the present invention, a plurality of magnetoresistive effect element bars are connected in series by means of bias magnets to constitute magnetoresistive effect elements, and magnetoresistive effect elements of the X-axis sensor and those of the Y-axis sensor are formed on a flat surface parallel to the flat surface of the substrate. The sensitivity direction of magnetization is a direction vertical to the longitudinal direction of each of the magnetoresistive effect element bars, and magnetoresistive effect elements of the X-axis sensor and those of the Y-axis sensor are formed in such a way that the magnetization directions are orthogonal to each other. Further, magnetoresistive effect elements of the Z-axis sensor are formed on a tilted surface of the projection projected from the flat surface of the substrate in such a way that the magnetization direction is inside the tilted surface. The Z-axis sensor is provided in such a way that the sensitivity direction is vertical to the longitudinal direction of the magnetoresistive effect element bar. |
申请公布号 |
EP1860451(A4) |
申请公布日期 |
2010.11.10 |
申请号 |
EP20060729388 |
申请日期 |
2006.03.17 |
申请人 |
YAMAHA CORPORATION |
发明人 |
SATO, HIDEKI;OMURA, MASAYOSHI;NAITO, HIROSHI;OOHASHI, TOSHIYUKI;WAKUI, YUKIO;OSUGA, CHIHIRO |
分类号 |
G01R33/09;H01L43/12 |
主分类号 |
G01R33/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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