| 摘要 |
<p>It is an object of the present invention to provide an ion pump system etc. having a high air-exhausting capacity and vacuum-maintaining capacity and capable of adjusting drive modes suitable for the uses thereof. The subject problem is solved by an ion pump system (7) comprising a casing (1), a first electrode group (2a,2b) provided in the casing (1), a second electrode group (3a,3b) provided on the outer periphery of the first electrode group (2a,2b), and outer magnets (4) for providing a magnetic field in the casing, wherein the first electrode group (2a,2b) and the second electrode group (3a,3b) are constituted as a plurality of layers alternately disposed around the center axis (11) of the casing (1).</p> |
