| 摘要 |
PURPOSE: A thin film discharge device of SMD(Surface Mount Device) type is provided to control the gap between poles by removing the roughness or the tolerance of the electrodes. CONSTITUTION: A first electrode(120), a second electrode(121), and a ground electrode(123) are plated on a ceramic substrate(100) through the photolithography, etching, and the patterning process. A first lead frame, a second lead frame, and a ground lead frame are connected to the electrodes patterned on the ceramic substrate, respectively.
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