发明名称 NANO PATTERNNING APPARATUS AND METHOD USING ELECTROSPINNING
摘要 <p>PURPOSE: A nanopatterning apparatus and a method using an electro-spinning method are provided to prevent precisely form a nanopattern by adjusting the speed difference between a polymer nanojet and a substrate. CONSTITUTION: A nanopatterning apparatus using an electro-spinning method comprises the following: a syringe(120) including a capillary tip(127), electro-spinning a polymer solution into a polymer nanojet; a pin type ground(130) forming the electric field among the capillary tip; a substrate(150) formed on the upper side of the ground, and forming a nanopattern by the adhesion of the polymer nanojet; and a linear stage(160) transferring the substrate.</p>
申请公布号 KR20100119630(A) 申请公布日期 2010.11.10
申请号 KR20090038658 申请日期 2009.05.01
申请人 SNU R&DB FOUNDATION 发明人 KIM, HO YOUNG;KIM, SUNG HO;LEE, MIN HEE
分类号 B82B3/00;D01D5/00;H01L21/027 主分类号 B82B3/00
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