发明名称 |
NANO PATTERNNING APPARATUS AND METHOD USING ELECTROSPINNING |
摘要 |
<p>PURPOSE: A nanopatterning apparatus and a method using an electro-spinning method are provided to prevent precisely form a nanopattern by adjusting the speed difference between a polymer nanojet and a substrate. CONSTITUTION: A nanopatterning apparatus using an electro-spinning method comprises the following: a syringe(120) including a capillary tip(127), electro-spinning a polymer solution into a polymer nanojet; a pin type ground(130) forming the electric field among the capillary tip; a substrate(150) formed on the upper side of the ground, and forming a nanopattern by the adhesion of the polymer nanojet; and a linear stage(160) transferring the substrate.</p> |
申请公布号 |
KR20100119630(A) |
申请公布日期 |
2010.11.10 |
申请号 |
KR20090038658 |
申请日期 |
2009.05.01 |
申请人 |
SNU R&DB FOUNDATION |
发明人 |
KIM, HO YOUNG;KIM, SUNG HO;LEE, MIN HEE |
分类号 |
B82B3/00;D01D5/00;H01L21/027 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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