发明名称 Arrangement for the regulation of the electron beam power of an electron gun
摘要 An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.
申请公布号 US7808183(B2) 申请公布日期 2010.10.05
申请号 US20060373865 申请日期 2006.03.10
申请人 APPLIED MATERIALS GMBH & CO. KG;ALD VACUUM TECHNOLOGIES GMBH 发明人 KLEMM GUENTER;THIEDE ANDREAS;SCHNEIDER HANS-JUERGEN
分类号 H05B41/14 主分类号 H05B41/14
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