发明名称 |
Advanced-process-control system utilizing a lambda tuner |
摘要 |
An advanced process control (APC) system. The APC system comprises a database for receiving process data from a measurement tool for a plurality of process runs and for storing the process data. A lambda tuner determines a tuned-lambda value corresponding to a process-capability-index value based on upper and lower process control limits and statistics derived from the process data. A process-run controller updates a recipe value based on the received process data and the tuned-lambda value.
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申请公布号 |
US7809459(B2) |
申请公布日期 |
2010.10.05 |
申请号 |
US20070006411 |
申请日期 |
2007.12.31 |
申请人 |
HITACHI GLOBAL TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
MORISAWA TOSHIHIRO;WALKER ANDREW C.;WONG YEAK-CHONG |
分类号 |
G06F19/00;G05B13/02;G06F17/10 |
主分类号 |
G06F19/00 |
代理机构 |
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