| 摘要 |
A system is provided including a chamber having an internal environment different from an external environment. The chamber includes a transmission line, disposed through a partition wall of the chamber, for transmitting an electromagnetic wave therethrough. A plurality of generators, disposed outside the chamber, are included for generating electromagnetic waves for measurement, and a first multiplex/demultiplex unit is disposed outside the chamber for multiplexing a plurality of electromagnetic waves from the plurality of generators and sending a multiplexed electromagnetic wave to the transmission line and demultiplexing a multiplexed electromagnetic wave received from the transmission line. A second multiplex/demultiplex unit is disposed inside the chamber for multiplexing a plurality of electromagnetic waves and sending a multiplexed electromagnetic wave to the transmission line and demultiplexing a multiplexed electromagnetic wave received from the transmission line. A plurality of measurement units are disposed inside the chamber for directing electromagnetic waves received from the second multiplex/demultiplex unit to to-be-measured regions and sending electromagnetic waves from the to-be-measured regions to the second multiplex/demultiplex unit.
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