发明名称 Method and system for characterizing porous materials
摘要 A method and system for diagnosing the effectiveness of a treatment on a porous material. For example, the porous material can include a porous low dielectric constant material. In particular, the method can utilize FTIR spectroscopy to characterize the porosity of materials, and assess the effectiveness of sealing pores in the material.
申请公布号 US7807213(B2) 申请公布日期 2010.10.05
申请号 US20070689937 申请日期 2007.03.22
申请人 TOKYO ELECTRON LIMITED 发明人 ZHU JIANHONG;TOMA DOREL IOAN
分类号 G01N13/00;B01D59/12;C23C16/52 主分类号 G01N13/00
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