| 发明名称 |
WIRE DRAWING DEVICE AND WIRE DRAWING METHOD |
| 摘要 |
<p>PURPOSE: A wiring drawing device and a wiring drawing method thereof are provided to configure a compact apparatus by measuring the thickness of wiring with a camera. CONSTITUTION: A spreading unit(30) describes the wiring by covering the substrate with material. A controller(9) adjusts the amount of spreading of the material. A camera(31) photographs the wiring described on the substrate. An anneal unit(32) heat processes the material spread on a panel(4). An image processor processes the image information received by camera.</p> |
| 申请公布号 |
KR20100106907(A) |
申请公布日期 |
2010.10.04 |
| 申请号 |
KR20100009355 |
申请日期 |
2010.02.02 |
| 申请人 |
KABUSHIKI KAISHA NIHON MICRONICS |
发明人 |
SANO MASAMI;NARUMI TAKAO;KANAZAWA KENTARO |
| 分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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