SUBSTRATE STAGE AND HEAT TREATMENT APPARATUS, AND MANUFACTURING METHOD OF THE SAID STAGE,申请号KR20070074364-传众专利搜索

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发明名称	SUBSTRATE STAGE AND HEAT TREATMENT APPARATUS, AND MANUFACTURING METHOD OF THE SAID STAGE
摘要
申请公布号	KR100985270(B1)	申请公布日期	2010.10.04
申请号	KR20070074364	申请日期	2007.07.25
申请人		发明人
分类号	H01L21/68;H01L21/67	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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